Incomplete listing of interactive campus maps and the main technology they use. Please fork and add more to this list or comment below and I'll add directly.
Campus maps using open source software
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University of Colorado Boulder: Leaflet + Mapbox + TileMill + OSM
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University of Wisconsin-Madison: Leaflet + Mapbox + TileMill + OSM
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Universify of California, Santa Cruz: OpenLayers + OSM / Leaflet + OSM
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Univerity of Montana: TileMill
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University of Delaware: OpenLayers + OSM
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University of Maryland: OpenLayers + OSM
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Vassar College: OpenLayers + ExtJS
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Yale University: Mapbox + OSM
Campus maps using google maps
Campus maps using Esri
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University of California, Los Angeles: Esri + Flex
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University of Oregon - Esri + Flex
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Louisiana State University - flash
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Humboldt State University: OpenLayers + http://www.nucloud.com illustrations
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Mount Mary University: OpenLayers + http://www.nucloud.com illustrations
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Southern Utah University - image with links to building pages
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University of California, San Diego: FacilitiesLink