Software R&D Team (School of Electrical and Information Engineering, Hunan University): Jie Liu, Wenze Yao, Chengyang Hou, Wei Liu, Hongcheng Xu, Haojie Zhao, Siyuan Zhang, Yujie Yang
Experiment R&D Team (School of Mechanical and Transportation Engineering, Hunan University)：Huigao Duan, Yiqin Chen, Jian Zhou
Homepage ：http://www.ebeam.com.cn/
We are open to collaborations on EBL simulation and optimization, EBL EDA tool development, etc. Feel free to email us if you are interested in collaborating with us.
We are working on developing and improving HnuEBL-GDS. Feel free to email us, if you have any question/suggestion:
[email protected]
[email protected]
1.GDSII file fast visualization(Referrence software:Klayout Homepage：https://klayout.de/)
2.layout dose visualization(layout color and dose size one-to-one correspondence)
1.map comparison before and after proximity effect correction
2.electronic dose visualization can be used to verify the effectiveness and feasibility of proximity effect dose correction method
Follow the installation package steps to install the software to a custom location on your computor
Button function:
"Open":Import a GDSII file
"Zoom In":Enlarge layout
"Zoom Out":Narrow layout
"View"->"Show Grid":Show grid or not
"View"->"Grid":Set grid size
"View"->"Show Texts":Show text in layout or not
"View"->"Show Layers Without Fill":Select whether the layout is filled
"View"->"Layers":Whether to display layout level information. Right-click the user can select a specific layer to view the layout information
"View"->"Highlight Object Under Mouse":Whether to emphasize the mouse pointing position