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hi,
I am the graduate student.I learned from your code.But I have some question about your code.Firstly,in the Source.py,why is (detax=wavelength/(NA*maskxpitch))?.Secondly,why did you use the Edeta function?Lastly,the zernike Coefficient(Cn)=0.0? I am very interested in computional lithography.I am looking forward to hearing from you.
thanks,
Yue
The text was updated successfully, but these errors were encountered:
hi,
I am the graduate student.I learned from your code.But I have some question about your code.Firstly,in the Source.py,why is (detax=wavelength/(NA*maskxpitch))?.Secondly,why did you use the Edeta function?Lastly,the zernike Coefficient(Cn)=0.0? I am very interested in computional lithography.I am looking forward to hearing from you.
thanks,
Yue
The text was updated successfully, but these errors were encountered: