script hangs

[horror-vacui]

I wanted to import a techfile from Cadence into KLayout with the following code:
klayout -z -rd tf_tile=cmos22fdsoi_tech_9M_2Mx_5Cx_1Jx_1Ox_LB/cmos22fdsoi_tech_9M_2Mx_5Cx_1Jx_1Ox_LB.tf -rd lyp_file=cmos22fdsoi_tech_9M_2Mx_5Cx_1Jx_1Ox_LB.lyp

The command is already running for more than half an hour and did not return to the shell. Its memory and CPU usage does not change, so I believe that it stuck into an infinite loop.
I am new to KLayout. I do not know how to debug it, I have not found any verbose switch in klayout -h.

PS: due to an NDA I am not allowed to share the techfile.

KLayout 0.26.2 and tf_import 1.0 were used.

Update: I've found the File-> "Import Cadence Techfile". Using this I got the following error message:

(eval):3313: syntax error, unexpected tCONSTANT, expecting ']'
            "VxBAR.S.Vx.2_V1,",  "VxBAR.S.Vx.2_...
             ^~~~~
(eval):3313: no .<digit> floating literal anymore; put 0 before dot
            "VxBAR.S.Vx.2_V1,",  "VxBAR.S.Vx.2_V1,", ...
                       ^
(eval):3313: trailing `_' in number
            "VxBAR.S.Vx.2_V1,",  "VxBAR.S.Vx.2_V1,",  "...
                         ^
(eval):3313: syntax error, unexpected tINTEGER, expecting '('
            "VxBAR.S.Vx.2_V1,",  "VxBAR.S.Vx.2_V1,",  "...